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A Three-Dimensional Photoresist Imaging Process Simulator for Strong Standing-Wave Effect Environment.

Akemi MoniwaToshiharu MatsuzawaTetsuo ItoHideo Sunami
Published in: IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. (1987)
Keyphrases
  • imaging process
  • three dimensional
  • viewpoint
  • d objects
  • super resolution
  • virtual reality