Toshiharu Matsuzawa

Publication Activity (10 Years)

Years Active: 1987-1987
Publications (10 Years): 0

Publications

Akemi Moniwa, Toshiharu Matsuzawa, Tetsuo Ito, Hideo Sunami
A Three-Dimensional Photoresist Imaging Process Simulator for Strong Standing-Wave Effect Environment. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 6 (3) (1987)