N. Hasegawa

Publication Activity (10 Years)

Years Active: 1987-1987
Publications (10 Years): 0

Publications

Teruo Matsuzawa, Akemi Moniwa, N. Hasegawa, Hideo Sunami
Two-Dimensional Simulation of Photolithography on Reflective Stepped Substrate. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 6 (3) (1987)