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A Two-Dimensional Integrated Process Simulator: SPIRIT-I.
Masanori Ohgo
Yasuko Takano
Akemi Moniwa
Shuichi Yamamoto
Yoshio Sakai
Hiroo Masuda
Hideo Sunami
Published in:
IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. (1987)
Keyphrases
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data sets
databases
neural network
artificial intelligence
digital libraries
multi dimensional
real time
real world
e learning
knowledge base
multiresolution
process model