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A. Padovani
Publication Activity (10 Years)
Years Active: 2019-2019
Publications (10 Years): 1
Top Topics
Gate Dielectrics
Thin Film
Differential Equations
Leakage Current
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Publications
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Chen Wu
,
Adrian Chasin
,
Andrea Padovani
,
Alicja Lesniewska
,
Steven Demuynck
,
Kris Croes
Role of Defects in the Reliability of HfO2/Si-Based Spacer Dielectric Stacks for Local Interconnects.
IRPS
(2019)