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The evaluation of mechanical stresses developed in underlying silicon substrates due to electroless nickel under bump metallization using synchrotron X-ray topography.

D. NoonanP. J. McNallyW.-M. ChenA. LankinenL. KnuuttilaT. O. TuomiA. N. DanilewskyR. Simon
Published in: Microelectron. J. (2006)
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