A Predictive Maintenance System for Silicon Epitaxial Deposition.

Gian Antonio Susto Alessandro Beghi Cristina De Luca

Published in: CASE (2011)

Keyphrases

chemical vapor deposition
thin film
electrical properties
high density
plasma etching
software maintenance
preventive maintenance
gate dielectrics
low density
databases
artificial intelligence
low cost
predictive model
software evolution