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Nanometer-Scale Patterning On Titanium Thin Film With Local Oxidation Of Scanning Probe Microscope.
Jeng T. Sheu
Cheng C. Chen
Sun P. Yeh
Hseih T. Chou
Published in:
Int. J. Comput. Eng. Sci. (2003)
Keyphrases
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thin film
electron microscopy
high density
short circuit
scale space
grain size
multi layer
solar cell
x ray
visual inspection
plasma etching
machine learning
fuzzy logic
structured light
room temperature
white light interferometry