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The role of a tensile stress bias for a sensitive silicon mechanical stress sensor based on a change in gate-induced-drain leakage current.

W. S. LauPeizhen YangS. Y. SiahL. Chan
Published in: Microelectron. Reliab. (2012)
Keyphrases
  • sensor data
  • leakage current
  • silicon dioxide
  • low voltage
  • finite element
  • low cost
  • high temperature
  • electrical properties
  • learning environment
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