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Influence of Interfacial Oxide Layers in Hf0.5Zr0.5O2 based ferroelectric capacitors on reliability performance.
Ruben Alcala
Furqan Mehmood
Pramoda Vishnumurthy
Terence Mittmann
Thomas Mikolajick
Uwe Schroeder
Published in:
IMW (2022)
Keyphrases
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