Login / Signup
Charge and energy deposition in thick silicon depletion layers by environmental ionizing radiation and terrestrial cosmic rays.
Ying Pang
Mauro Ciappa
Published in:
Microelectron. Reliab. (2018)
Keyphrases
</>
ionizing radiation
plasma etching
total energy
space charge
chemical vapor deposition
energy consumption
thin film
high density
low dose
electrical properties
multi layer