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Charge and energy deposition in thick silicon depletion layers by environmental ionizing radiation and terrestrial cosmic rays.

Ying PangMauro Ciappa
Published in: Microelectron. Reliab. (2018)
Keyphrases
  • ionizing radiation
  • plasma etching
  • total energy
  • space charge
  • chemical vapor deposition
  • energy consumption
  • thin film
  • high density
  • low dose
  • electrical properties
  • multi layer