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Enhanced fatigue resistance of ferroelectric Al0.65Sc0.35N deposited by physical vapor deposition.
Yang Li
Danyang Yao
Yan Liu
Zhi Jiang
Ruiqing Wang
Xu Ran
Jiuren Zhou
Qikun Wang
Guoqiang Wu
Genquan Han
Published in:
Sci. China Inf. Sci. (2024)
Keyphrases
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electrical properties
chemical vapor deposition
permalloy films
thin film
film thickness
diffusion process
rf sputtering
electron microscopy
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