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Development, Characterisation and High-Temperature Suitability of Thin-Film Strain Gauges Directly Deposited with a New Sputter Coating System.
Daniel Klaas
Rico Ottermann
Folke Dencker
Marc Christopher Wurz
Published in:
Sensors (2020)
Keyphrases
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thin film
high temperature
electron microscopy
film thickness
high density
grain size
chemical vapor deposition
silicon nitride
short circuit
machine learning
data streams
decision support system
x ray
design process
development process
multi layer