110GHz Through-Silicon Via's Integrated in Silicon Photonics Interposers for Next-Generation Optical Modules.
Kenichi MiyaguchiYoojin BanNicolas PantanoXiao SunPhilippe AbsilLieve BogaertsPeter VerheyenDimitrios VelenisMarianna PantouvakiJoris Van CampenhoutPublished in: ECOC (2021)