high-density and low energy plasma at low temperature.

Chuan Jie Zhong Hiroaki Tanaka Shigetoshi Sugawa Tadahiro Ohmi

Published in: Microelectron. J. (2006)

Keyphrases

high density
low energy
thin film
electron microscopy
minimum energy
low density
close proximity
plasma etching
chemical vapor deposition
protein folding
data center
high power
magnetic recording
high bandwidth
coarse grained
magnetic tape
communication networks
databases