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Chuan Jie Zhong
Publication Activity (10 Years)
Years Active: 2006-2006
Publications (10 Years): 0
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Publications
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Chuan Jie Zhong
,
Hiroaki Tanaka
,
Shigetoshi Sugawa
,
Tadahiro Ohmi
high-density and low energy plasma at low temperature.
Microelectron. J.
37 (1) (2006)