Developing GLAD Parameters to Control the Deposition of Nanostructured Thin Film.

Jakub Bronicki Dominik Grochala Artur Rydosz

Published in: Sensors (2022)

Keyphrases

thin film
film thickness
high density
room temperature
control parameters
control system
multi layer
short circuit
maximum likelihood
electron microscopy
plasma etching
chemical vapor deposition
control method
grain size
expert systems
fuzzy logic
database systems
database