On-wafer probe station for microwave metrology at the nanoscale.
Abdelhatif El FellahiKamel HaddadiJaouad MarzoukSteve ArscottChristophe BoyavalTuami LasriGilles DambrinePublished in: I2MTC (2015)
Keyphrases
- semiconductor manufacturing
- process control
- camera calibration
- single view
- atomic force microscopy
- integrated circuit
- data structure
- multi view
- massively parallel
- mechanical properties
- probe image
- high frequency
- control system
- production system
- surface reconstruction
- artificial intelligence
- manufacturing process
- decision trees
- deep space
- decision making