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Modeling and optimization of the growth rate for ZnO thin films using neural networks and genetic algorithms.
Young-Don Ko
Pyung Moon
Chang Eun Kim
Moon-Ho Ham
Jae-Min Myoung
Ilgu Yun
Published in:
Expert Syst. Appl. (2009)
Keyphrases
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thin film
growth rate
neural networks and genetic algorithms
high density
short circuit
fuzzy logic
grain size
room temperature
neural network
plasma etching
multi layer
genetic algorithm
optimization model
artificial intelligence
traffic control
economic development
chemical vapor deposition