On-line Process Physics Tests via Lyapunov-based Economic Model Predictive Control and Simulation-Based Testing of Image-Based Process Control.
Henrique OyamaAkkarakaran Francis LeonardMinhazur RahmanGovanni GjonajMichael WilliamsonHelen DurandPublished in: ACC (2022)
Keyphrases
- process control
- control system
- model predictive control
- control charts
- manufacturing process
- product quality
- intelligent control
- artificial intelligence
- semiconductor manufacturing
- test cases
- test data
- knowledge base
- control scheme
- closed loop
- test suite
- intelligent systems
- rough sets
- fuzzy logic
- decision trees
- decision making