Surface planarization of ZnO thin film for optoelectronic applications.

Woo-Sun Lee Gwon-Woo Choi Yong-Jin Seo

Published in: Microelectron. J. (2009)

Keyphrases

thin film
white light interferometry
film thickness
high density
short circuit
three dimensional
solar cell
multi layer
electron microscopy
grain size
room temperature
chemical vapor deposition
d objects
neural network
object surface
surface reconstruction
plasma etching