Feedback control of MOCVD growth of submicron compound semiconductor films.
Sean C. WarnickMunther A. DahlehPublished in: IEEE Trans. Control. Syst. Technol. (1998)
Keyphrases
- feedback control
- closed loop
- optimal control
- silicon dioxide
- adaptive control
- open loop
- vlsi circuits
- fractional order
- feedback controller
- electron beam
- plasma etching
- autonomous control
- inverted pendulum
- linear time invariant
- networked control systems
- electrical properties
- gallium arsenide
- control law
- low power
- least squares
- semiconductor manufacturing
- fuzzy control
- petri net
- particle swarm optimization
- state space
- real time