Precise Positioning and Defect Detection of Semiconductor Chip Based on Microvision.

Xu Zhao Yingjian Wang Lianpeng Li Fuchao Liu

Published in: ICCSIP (2021)

Keyphrases

defect detection
feature extraction
low cost
high speed
automated visual inspection
analog vlsi
vlsi design
high density
vlsi implementation
physical design
textured surfaces
single chip
programmable logic
infrared
quality control
genetic algorithm
semiconductor manufacturing
database