Temperature Sensor employing Ring Oscillator composed of Poly-Si Thin-Film Transistors: Comparison between Lightly-Doped and Offset Drain Structures.
Jun TayaKazuki KojimaTomonori MukudaAkihiro NakashimaYuki SagawaTokiyoshi MatsudaMutsumi KimuraPublished in: IEICE Trans. Electron. (2014)
Keyphrases
- thin film
- room temperature
- chemical vapor deposition
- high density
- solar cell
- plasma etching
- low density
- film thickness
- grain size
- field effect transistors
- chance discovery
- short circuit
- electron microscopy
- multi layer
- data center
- sensor data
- database
- cloud computing
- sensor networks
- white light interferometry
- early warning
- data management
- wireless sensor networks