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as gate dielectrics.
M. Fadlallah
Arkadiusz Szewczyk
C. Giannakopoulos
B. Cretu
Frederic Monsieur
T. Devoivre
Jalal Jomaah
Gérard Ghibaudo
Published in:
Microelectron. Reliab. (2001)
Keyphrases
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gate dielectrics
electrical properties
si sio
field effect transistors
cost effective
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