Scanning electron beam induced deposition for conductive tip modification.

P. L. Chen James Su M. H. Shiao M. N. Chang C. H. Lee Chee Wee Liu

Published in: NEMS (2012)

Keyphrases

electron beam
x ray
integrated circuit
thin film
design parameters
semiconductor devices
electrical properties
image processing
electron beam lithography
neural network
genetic algorithm
fuzzy logic
plasma etching