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Fast Positioning of Cutting Tool by a Voice Coil Actuator for Micro-Lens Fabrication.

Young Jin NohMasayuki NagashimaYoshikazu AraiWei Gao
Published in: Int. J. Autom. Technol. (2009)
Keyphrases
  • cutting tool
  • computer aided design
  • tool wear
  • flank wear
  • high density
  • integrated circuit
  • control system
  • computer aided
  • condition monitoring
  • database
  • object oriented
  • closed loop
  • case study
  • design process