Characterization of Zinc Oxide and Pentacene Thin Film Transistors for CMOS Inverters.
Hiroyuki IechiYasuyuki WatanabeHiroshi YamauchiKazuhiro KudoPublished in: IEICE Trans. Electron. (2008)
Keyphrases
- thin film
- high density
- electron microscopy
- silicon nitride
- room temperature
- circuit design
- power consumption
- cmos technology
- low power
- field effect transistors
- high speed
- low density
- short circuit
- grain size
- low cost
- gate dielectrics
- solar cell
- metal oxide semiconductor
- power supply
- integrated circuit
- low voltage
- plasma etching
- white light interferometry
- film thickness
- multi layer
- neural network