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The surface quality of monocrystalline silicon cutting using fixed abrasive diamond endless wire saw.

J. F. MengP. Q. GeJ. F. Li
Published in: Int. J. Comput. Appl. Technol. (2007)
Keyphrases
  • high quality
  • low cost
  • three dimensional
  • higher quality
  • surface features
  • free form
  • surface model
  • si sio
  • gallium arsenide
  • real time
  • object recognition
  • d objects
  • fixed number
  • object surface
  • silicon dioxide