L-shape based layout fracturing for e-beam lithography.
Bei YuJhih-Rong GaoDavid Z. PanPublished in: ASP-DAC (2013)
Keyphrases
- electron beam
- electron beam lithography
- level set
- x ray
- object recognition
- shape representation
- reinforced concrete
- cross section
- integrated circuit
- shape features
- real world
- design parameters
- database
- feature extraction
- information retrieval
- object detection
- decision trees
- spatial layout
- machine learning
- cf loadingtexthtml
- website
- image processing