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Effect of Oxidation on Conductivity Characteristics of Tungsten-Rhenium Thin-Film Thermocouples Sensor.
Zhongkai Zhang
Bian Tian
Zhe Du
Qijing Lin
Kaikai Li
Na Zhao
Zhuangde Jiang
Published in:
NEMS (2019)
Keyphrases
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thin film
electron microscopy
short circuit
high density
multi layer
sensor networks
expert systems
grain size
room temperature
neural network
chemical vapor deposition
solar cell
sensor data
learning experience
film thickness
multiresolution
database
plasma etching
white light interferometry