Bond Strength Optimization of Plasma Activated Low Temperature Oxide-Oxide Fusion Bonding Through Thermocycling.
Patrick KrügerThomas VoßMatthias WietstruckPublished in: 3DIC (2021)
Keyphrases
- fuel cell
- metal oxide
- room temperature
- electron microscopy
- optimization problems
- optimization algorithm
- information fusion
- electrical properties
- data fusion
- optimization strategies
- neural network
- transmission electron microscopy
- discrete optimization
- fusion algorithm
- optimization process
- optimization method
- x ray
- real time
- thin film
- fault detection
- global optimization
- fusion process
- multiscale
- three dimensional