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MIS-Like Structures with Silicon-Rich Oxide Films Obtained by HFCVD: Their Response as Photodetectors.

Gabriel Omar Mendoza CondeJosé Alberto Luna LópezZaira Jocelyn Hernández SimónJosé Álvaro David Hernández de la LuzGodofredo García SalgadoErick Gastellou HernándezHaydee Patricia Martínez-HernándezJavier Flores-Méndez
Published in: Sensors (2022)
Keyphrases
  • silicon dioxide
  • transmission electron microscopy
  • electrical properties
  • information systems
  • low cost
  • high speed
  • data sets
  • film restoration
  • metal oxide