The construction of coherence microscope for extreme ultraviolet mask defect inspection in synchrotron facility.
Jyun-Yan ChuangYu-Zheng LinWei-Cheng ChenChang-sheng LinPublished in: SII (2017)
Keyphrases
- defect detection
- visual inspection
- automated visual inspection
- light source
- infrared
- databases
- automatic inspection
- facility location problem
- construction process
- knowledge base
- machine learning
- expert systems
- relational databases
- control system
- wireless sensor networks
- digital images
- bayesian networks
- database systems
- image processing
- information systems
- laser scanning
- national laboratory
- data mining
- database