Raman scattering of polycrystalline 3C-SiC film deposited on AlN buffer layer by using CVD with HMDS.

Gwiy-Sang Chung Kang-San Kim

Published in: Microelectron. J. (2008)

Keyphrases

film thickness
thin film
multi layer
high density
multi component
neural network
multiple layers
room temperature
electron microscopy
silicon nitride
permalloy films
chemical vapor deposition
middle layer
neural nets
computer conferencing
refractive index
raman spectra
learning resources