The influence of growth temperature and precursors' doses on electrical parameters of ZnO thin films grown by atomic layer deposition technique.
Tomasz KrajewskiE. GuziewiczMarek GodlewskiLukasz WachnickiI. A. KowalikA. Wojcik-GlodowskaM. LukasiewiczK. KopalkoV. OsinniyM. GuziewiczPublished in: Microelectron. J. (2009)