Photonic Curing: Rapid Thermal Processing of Oxide Thin-film Transistors on Plastic.
Neel ChatterjeeAdam M. WeidlingSarah L. SwisherPublished in: DRC (2022)
Keyphrases
- thin film
- room temperature
- high density
- electron microscopy
- silicon nitride
- short circuit
- grain size
- data processing
- solar cell
- field effect transistors
- low density
- power consumption
- multi layer
- electrical properties
- chemical vapor deposition
- integrated circuit
- fuel cell
- x ray
- query processing
- white light interferometry