Fabrication of Nanopillar Micropatterns by Hybrid Mask Lithography for Surface-Directed Liquid Flow.
Shinya SakumaMasakuni SugitaFumihito AraiPublished in: Micromachines (2013)
Keyphrases
- electron beam
- electron beam lithography
- surface reconstruction
- water flow
- three dimensional
- navier stokes equations
- high density
- integrated circuit
- hybrid learning
- semiconductor devices
- shape index
- neural network
- d objects
- flow rate
- gradient flow
- flow patterns
- flow field
- free form
- vector field
- surface features
- mathematical model
- high speed
- flat areas
- numerical simulations