Dielectric thin films for MEMS-based optical sensors.
M. MartyniukJ. AntoszewskiC. A. MuscaJ. M. DellL. FaraonePublished in: Microelectron. Reliab. (2007)
Keyphrases
- thin film
- chemical vapor deposition
- white light interferometry
- high density
- imaging sensors
- silicon nitride
- electrical properties
- film thickness
- sensor networks
- sensor data
- short circuit
- optical images
- electro optic
- real time
- grain size
- multi sensor
- data fusion
- multi layer
- focal plane
- machine learning
- plasma etching
- multiple scattering
- solar cell
- high resolution
- low density