High Performance Thermally Resistant FinFETs DRAM Peripheral CMOS FinFETs with VTH Tunability for Future Memories.
Romain RitzenthalerE. CapogrecoE. DupuyHiroaki ArimuraJ. P. BastosP. FaviaF. SebaaiD. RadisicV. T. H. NguyenG. MannaertB. T. ChanV. MachkaoutsanY. YoonH. ItokawaM. YamaguchiY. ChenPierre FazanS. SubramanianAlessio SpessotE. Dentoni LittaS. SamavedamNaoto HoriguchiPublished in: VLSI Technology and Circuits (2022)