Dry etch damage and recovery of gallium indium zinc oxide thin-film transistors with etch-back structures.

Jae-Chul Park Ho-Nyeon Lee

Published in: Displays (2012)

Keyphrases

thin film
room temperature
high density
field effect transistors
manufacturing process
electron microscopy
short circuit
silicon nitride
multi layer
low density
solar cell
grain size
white light interferometry
databases
data center
power consumption
low power
plasma etching
low cost
fuzzy logic