Investigation of Ga2O3-Based Deep Ultraviolet Photodetectors Using Plasma-Enhanced Atomic Layer Deposition System.
Shao-Yu ChuMeng-Xian ShenTsung-Han YehChia-Hsun ChenChing-Ting LeeHsin-Ying LeePublished in: Sensors (2020)
Keyphrases
- thin film
- plasma etching
- genetic algorithm ga
- chemical vapor deposition
- multi layer
- genetic algorithm
- multiple layers
- middle layer
- evolutionary algorithm
- fitness function
- artificial neural networks
- high density
- low density
- infrared
- hybrid algorithm
- neural network
- multi objective
- machine learning
- parallel genetic algorithm
- single layer
- application layer
- genetic programming
- hybrid genetic algorithm
- parameter set
- high energy
- case study
- simulated annealing
- fuzzy logic