Influence of substrate bias on the resistivity and TCR of nanostructured Ta-Si-N films.

Chen-Kuei Chung Y. L. Chang T. S. Chen

Published in: NEMS (2009)

Keyphrases

grain size
metal oxide
film thickness
thin film
chemical vapor deposition
room temperature
rf sputtering
solar cell
social influence
electron microscopy
prior studies
data sets
factors influencing
high speed
trade off
information systems
learning algorithm
information retrieval