Optimization, estimation, and control for kinetic Monte Carlo simulations of thin film deposition.

Martha A. Gallivan

Published in: CDC (2003)

Keyphrases

thin film
monte carlo simulation
monte carlo
markov chain
high density
grain size
short circuit
electron microscopy
chemical vapor deposition
solar cell
plasma etching
control system
multi layer
control method
databases
cost effective
experimental data
control strategy
particle filter
low cost
database systems