Deep reinforcement learning based scheduling within production plan in semiconductor fabrication.
Young Hoon LeeSeunghoon LeePublished in: Expert Syst. Appl. (2022)
Keyphrases
- reinforcement learning
- semiconductor manufacturing
- plasma etching
- wafer fabrication
- production line
- production scheduling
- semiconductor devices
- production planning
- scheduling problem
- shop floor
- preventive maintenance
- scheduling algorithm
- planning process
- function approximation
- integrated circuit
- high density
- round robin
- resource allocation
- plan recognition
- high speed
- state space
- reinforcement learning algorithms
- plan generation
- production system
- material handling
- thin film
- batch processing
- plan execution
- model free
- resource constraints
- decision theoretic
- production planning and scheduling
- optimal control
- single machine
- optimal policy
- multi agent
- learning algorithm
- gallium arsenide
- machine learning
- low density
- electron beam
- manufacturing process
- parallel machines
- processing times
- multistage
- dynamic environments