Sensing Membrane Deposition Temperature.
Khairul Aimi YusofRohanieza Abdul RahmanMuhammad AlHadi ZulkefleSukreen Hana HermanWan Fazlida Hanim AbdullahPublished in: J. Sensors (2016)
Keyphrases
- chemical vapor deposition
- rf sputtering
- film thickness
- thin film
- sensor networks
- room temperature
- permalloy films
- real time
- high density
- magnetic field
- low cost
- unstructured environments
- high temperature
- electrical properties
- heat flow
- monitoring system
- power consumption
- electric field
- social networks
- genetic algorithm
- real world
- neural network