Reduction of plasma-induced fluorine damage to P-HEMTs using x-ray emission.

Hiroyuki Uchiyama Takafumi Taniguchi Takeshi Kikawa

Published in: IEICE Electron. Express (2005)

Keyphrases

x ray
x ray images
medical imaging
digital x ray images
intraoperative
three dimensional
ct scans
electron microscopy
projection images
transmission electron microscopy
tomographic images
thin film
high density
optical imaging
high energy
electron beam
computer aided
multi view