Hybrid mask lithography for fabrication of micro-pattern with nano-pillars.

Shinya Sakuma Masakuni Sugita Fumihito Arai

Published in: NEMS (2012)

Keyphrases

electron beam
electron beam lithography
high speed
integrated circuit
pattern detection
pattern matching
x ray
nano scale
hybrid learning
hybrid approaches
semiconductor devices
video sequences
website
bounding box
database
high density
computer vision
information retrieval
similar patterns
neural network