Improving hydrogenation efficiency of polycrystalline silicon thin film transistors by a new approach.

Xiangbin Zeng X. W. Sun Johnny K. O. Sin

Published in: Microelectron. J. (2003)

Keyphrases

thin film
high density
solar cell
grain size
plasma etching
chemical vapor deposition
low density
short circuit
data center
room temperature
cmos technology
electron microscopy
multi layer
silicon nitride
field effect transistors
database
white light interferometry
film thickness
space charge
neural network