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Reliability improvement by the suppression of keyhole generation in W-plug vias.
Jong Hun Kim
Kyosun Kim
Seok Hee Jeon
Jong-Tae Park
Published in:
Microelectron. Reliab. (2005)
Keyphrases
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image guided
edge detection
plan recognition
neural network
integrated circuit
high density
reliability assessment
machine learning
information retrieval
computer vision
information systems
decision making
web services
database systems
significant improvement
failure rate